- 专利标题: Semiconductor device having a U-shaped gate structure
-
申请号: US10274867申请日: 2002-10-22
-
公开(公告)号: US06833588B2公开(公告)日: 2004-12-21
- 发明人: Bin Yu , Shibly S. Ahmed , Judy Xilin An , Srikanteswara Dakshina-Murthy , Zoran Krivokapic , Haihong Wang
- 申请人: Bin Yu , Shibly S. Ahmed , Judy Xilin An , Srikanteswara Dakshina-Murthy , Zoran Krivokapic , Haihong Wang
- 主分类号: H01L2701
- IPC分类号: H01L2701
摘要:
A double-gate semiconductor device includes a substrate, an insulating layer, a fin and a gate. The insulating layer is formed on the substrate and the gate is formed on the insulating layer. The fin has a number of side surfaces, a top surface and a bottom surface. The bottom surface and at least a portion of the side surfaces of the fin are surrounded by the gate. The gate material surrounding the fin has a U-shaped cross-section at a channel region of the semiconductor device.
公开/授权文献
- US20040075121A1 Semiconductor device having a U-shaped gate structure 公开/授权日:2004-04-22
信息查询