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US06837076B2 Method of producing oxide soot using a burner with a planar burner face 有权
使用具有平面燃烧器面的燃烧器生产氧化烟炱的方法

Method of producing oxide soot using a burner with a planar burner face
Abstract:
A burner and a method for producing an inorganic soot such as silica comprising a plurality of substantially planar layers having multiple openings therethrough formed by a micromachining process. The openings are in fluid communication with a precursor inlet and a gas inlet to permit the gas and the precursor to flow through and exit the burner. The burner produces a flame from a combustible gas in which the precursor undergoes a chemical reaction to form the soot.
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