发明授权
US06838318B1 Clad plate for forming interposer for semiconductor device, interposer for semiconductor device, and method of manufacturing them 失效
用于形成用于半导体器件的插入件的包层板,用于半导体器件的插入件及其制造方法

Clad plate for forming interposer for semiconductor device, interposer for semiconductor device, and method of manufacturing them
摘要:
A clad plate for forming an interposer for a semiconductor device which can be manufactured at low cost and has good characteristics, an interposer for a semiconductor device, and a method of manufacturing them. Copper foil materials (19, 24, 33) forming conductive layers (10, 17, 18) and nickel plating (20, 21) forming etching stopper layers (11, 12) are formed and pressed to form a clad plate (34) for forming an interposer for a semiconductor device. Thus, a clad plate (34) for forming an interposer for a semiconductor device is manufactured. The clad plate (34) is selectively etched to form a columnar conductor (17), and an insulating layer (13) is formed on the copper foil material forming a wiring layer (10). A bump (18) for connection of a semiconductor chip and the wiring layer (10) are formed on the opposite side to the side on which the columnar conductor (17) is formed. Thus, an interposer for a semiconductor device is manufactured.
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