发明授权
US06841312B1 Method and apparatus for coupling a pellicle assembly to a photomask
失效
用于将防护薄膜组件耦合到光掩模的方法和装置
- 专利标题： Method and apparatus for coupling a pellicle assembly to a photomask
- 专利标题（中）： 用于将防护薄膜组件耦合到光掩模的方法和装置
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申请号： US10120935申请日： 2002-04-11
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公开(公告)号： US06841312B1公开(公告)日： 2005-01-11
- 发明人: Franklin D. Kalk
- 申请人： Franklin D. Kalk
- 申请人地址： US TX Round Rock
- 专利权人： DuPont Photomasks, Inc.
- 当前专利权人： DuPont Photomasks, Inc.
- 当前专利权人地址： US TX Round Rock
- 代理机构： Baker Botts L.L.P.
- 主分类号： G03F1/14
- IPC分类号： G03F1/14 ; G03F9/00
摘要：
A method and apparatus for coupling a pellicle assembly to a photomask are disclosed. A pellicle assembly is mounted on a photomask by bringing an adhesive material formed on a surface of a frame associated with the pellicle assembly in contact with the photomask. The adhesive material is heated to cause the adhesive gasket to flow and comply with a flatness of the photomask.
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