Invention Grant
- Patent Title: Multi-level shielded multi-conductor interconnect bus for MEMS
- Patent Title (中): 用于MEMS的多层屏蔽多导体互连总线
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Application No.: US10426433Application Date: 2003-04-30
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Publication No.: US06841464B2Publication Date: 2005-01-11
- Inventor: Stephen Matthew Barnes , Samuel Lee Miller , Murray Steven Rodgers
- Applicant: Stephen Matthew Barnes , Samuel Lee Miller , Murray Steven Rodgers
- Applicant Address: US NM Albuquerque
- Assignee: MEMX, Inc.
- Current Assignee: MEMX, Inc.
- Current Assignee Address: US NM Albuquerque
- Agency: Marsh Fischmann & Breyfogle LLP
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/4763

Abstract:
A multi-level shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources and a method of fabricating a multi-level shielded multi-conductor interconnect bus are disclosed. In one embodiment, a multi-level shielded interconnect bus (410A) formed on a substrate (20) includes first and second level electrically conductive lines (42, 92) arranged in sets of one, two or more conductive lines between first and second level electrically conductive shield walls (46, 66, 96). The first and second level electrically conductive lines (42, 92) are surrounded by various layers of dielectric material (30, 50, 80, 100). A first level electrically conductive shield (78) overlies the first level electrically conductive lines (42) and shield walls (46, 66). A second level electrically conductive shield (112) overlies the second level electrically conductive lines (92) and shield walls (96).
Public/Granted literature
- US20030201470A1 Multi-level shielded multi-conductor interconnect bus for MEMS Public/Granted day:2003-10-30
Information query
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