发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US09970771申请日: 2001-10-05
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公开(公告)号: US06841879B2公开(公告)日: 2005-01-11
- 发明人: Takaaki Murakami , Kazuyuki Sugahara
- 申请人: Takaaki Murakami , Kazuyuki Sugahara
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Leydig, Voit & Mayer, Ltd.
- 优先权: JP2001-144431 20010515
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/336 ; H01L29/45 ; H01L29/78 ; H01L23/48
摘要:
A field-effect transistor including N−-extension regions, an N+-drain region, an N+-source region and a gate electrode at a surface of a silicon substrate. A sidewall insulating film on one of the side surfaces of the gate electrode partially covers the surface of the N−-extension region, and a sidewall insulating film on the other side surface entirely covers the N−-extension region. Further, a silicon oxide film covers the surface of N−-extension region not covered by the sidewall insulating film. Thereby, resistances of the gate electrode, source region, and drain region can be easily reduced in a transistor having extension regions, which are asymmetrical with respect to the gate electrode.
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