发明授权
- 专利标题: Method of manufacturing color filter
- 专利标题(中): 彩色滤光片制作方法
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申请号: US10329576申请日: 2002-12-27
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公开(公告)号: US06844121B2公开(公告)日: 2005-01-18
- 发明人: Eric Wang , Robin Shyu , Jim Chung , Michael Kuo
- 申请人: Eric Wang , Robin Shyu , Jim Chung , Michael Kuo
- 申请人地址: TW Taipei
- 专利权人: Premier Image Technology
- 当前专利权人: Premier Image Technology
- 当前专利权人地址: TW Taipei
- 代理机构: Browdy and Neimark, P.L.L.C.
- 主分类号: G02B5/20
- IPC分类号: G02B5/20 ; G03F7/00 ; G03F7/30 ; G03F9/00
摘要:
A method of manufacturing color filter comprising the steps of forming a metal layer and a photoresistor layer on a substrate; defining a dent over the photoresistor layer and removing the metal layer below the dent; depositing an optical filter material over the resulting structure at relative high temperature, lift off the photoresistor layer by etching the metal layer. The optical filter material can be fabricated at higher temperature (300-400° C.) than conventional cold process, the extinction ratio of the filter made by the optical filter material can be as high as 90% to enhance the performance of the projector system.
公开/授权文献
- US20040126676A1 Method of manufacturing color filter 公开/授权日:2004-07-01
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