发明授权
- 专利标题： Fiber optic semiconductor analysis arrangement and method therefor
- 专利标题（中）： 光纤半导体分析布置及其方法
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申请号： US09838717申请日： 2001-04-19
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公开(公告)号： US06844928B1公开(公告)日： 2005-01-18
- 发明人: Glen P. Gilfeather , Srikar V. Chunduri , Brennan V. Davis , David H. Eppes , Victoria Bruce , Michael Bruce , Rosalinda M. Ring , Daniel Stone
- 申请人： Glen P. Gilfeather , Srikar V. Chunduri , Brennan V. Davis , David H. Eppes , Victoria Bruce , Michael Bruce , Rosalinda M. Ring , Daniel Stone
- 申请人地址： US CA Sunnyvale
- 专利权人： Advanced Micro Devices, Inc.
- 当前专利权人： Advanced Micro Devices, Inc.
- 当前专利权人地址： US CA Sunnyvale
- 主分类号： G01N21/95
- IPC分类号： G01N21/95 ; G01N21/00
摘要：
The operability of light-based semiconductor die analysis is enhanced using a method and arrangement that directs light between a light source and a die. In one example embodiment of the present invention, a light source is directed to a die in a semiconductor analysis arrangement using a fiber optic cable. The analysis arrangement is adapted to use light received via the fiber optic cable to analyze the die. The analysis includes one or more light-based applications, such as stimulating a selected portion of the die with the light and detecting a response therefrom. In this manner, light can be directed to a die in a variety of analysis implementations, such as for analyzing a die in a test chamber.
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