发明授权
US06846612B2 Organic anti-reflective coating compositions for advanced microlithography 有权
用于先进微光刻的有机抗反射涂料组合物

Organic anti-reflective coating compositions for advanced microlithography
摘要:
New polymers and new anti-reflective compositions containing such polymers are provided. The compositions comprise a polymer (e.g., epoxy cresol novolac resins) bonded with a chromophore (4-hydroxybenzoic acid, trimellitic anhydride). The inventive compositions can be applied to substrates (e.g., silicon wafers) to form anti-reflective coating layers having high etch rates which minimize or prevent reflection during subsequent photoresist exposure and developing.
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