发明授权
US06846612B2 Organic anti-reflective coating compositions for advanced microlithography
有权
用于先进微光刻的有机抗反射涂料组合物
- 专利标题: Organic anti-reflective coating compositions for advanced microlithography
- 专利标题(中): 用于先进微光刻的有机抗反射涂料组合物
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申请号: US10062790申请日: 2002-02-01
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公开(公告)号: US06846612B2公开(公告)日: 2005-01-25
- 发明人: Shreeram V. Deshpande
- 申请人: Shreeram V. Deshpande
- 申请人地址: US MO Rolla
- 专利权人: Brewer Science Inc.
- 当前专利权人: Brewer Science Inc.
- 当前专利权人地址: US MO Rolla
- 代理机构: Hovey Williams LLP
- 主分类号: C08F8/14
- IPC分类号: C08F8/14 ; C08G59/14 ; C08G59/32 ; C08G59/42 ; C08G59/62 ; C08G63/68 ; C08G63/91 ; C08G65/329 ; C09D133/02 ; C09D163/00 ; C09D167/00 ; C09D171/02 ; G03F7/09 ; G03C1/492 ; C08L63/00
摘要:
New polymers and new anti-reflective compositions containing such polymers are provided. The compositions comprise a polymer (e.g., epoxy cresol novolac resins) bonded with a chromophore (4-hydroxybenzoic acid, trimellitic anhydride). The inventive compositions can be applied to substrates (e.g., silicon wafers) to form anti-reflective coating layers having high etch rates which minimize or prevent reflection during subsequent photoresist exposure and developing.
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