Invention Grant
- Patent Title: Microelectromechnical system for tilting a platform
- Patent Title (中): 用于倾斜平台的微机电系统
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Application No.: US10697385Application Date: 2003-10-30
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Publication No.: US06847152B2Publication Date: 2005-01-25
- Inventor: Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
- Applicant: Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
- Applicant Address: US NM Albuquerque
- Assignee: MEMX, Inc.
- Current Assignee: MEMX, Inc.
- Current Assignee Address: US NM Albuquerque
- Agency: Marsh Fischmann & Breyfogle LLP
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H02N1/00 ; G02B26/08 ; G02B26/10

Abstract:
The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
Public/Granted literature
- US20040090143A1 Large tilt angle MEM platform Public/Granted day:2004-05-13
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