发明授权
- 专利标题: Current-stabilizing illumination of photocathode electron beam source
- 专利标题(中): 光电阴极电子束源的电流稳定照明
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申请号: US10316970申请日: 2002-12-10
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公开(公告)号: US06847164B2公开(公告)日: 2005-01-25
- 发明人: Gordon Janaway , Steven Coyle
- 申请人: Gordon Janaway , Steven Coyle
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Matrials, Inc.
- 当前专利权人: Applied Matrials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Ashok Janah
- 主分类号: H01J37/073
- IPC分类号: H01J37/073 ; H01J40/06
摘要:
An electron beam source has a photocathode with a photoemitter material having a work function, and with a beam receiving portion and an electron emitting portion. A first light source directs a first light beam onto the beam receiving portion of the photocathode to generate an electron beam from the electron emitting portion. The first light beam has a wavelength λ1 such that hc/λ1 is at least about the work function of the photoemitter material, where ‘h’ is Planck's constant and ‘c’ is the speed of light. A second light source directs a second light beam onto the beam receiving portion of the photocathode, such as onto the beam receiving portion, to stabilize the electron beam. The second light beam having a wavelength λ2 such that hc/λ2 is less than about the work function of the photoemitter material.
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