发明授权
- 专利标题: Method for making ink jet printheads
- 专利标题(中): 制造喷墨打印头的方法
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申请号: US09929849申请日: 2001-08-14
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公开(公告)号: US06852241B2公开(公告)日: 2005-02-08
- 发明人: Brian Christopher Hart , Shauna Marie Leis , Gary Raymond Williams
- 申请人: Brian Christopher Hart , Shauna Marie Leis , Gary Raymond Williams
- 申请人地址: US KY Lexington
- 专利权人: Lexmark International, Inc.
- 当前专利权人: Lexmark International, Inc.
- 当前专利权人地址: US KY Lexington
- 代理机构: Luedeka, Neely & Graham
- 主分类号: B41J2/16
- IPC分类号: B41J2/16 ; B21D53/76 ; B23P17/00 ; G01D15/00 ; G11B5/127
摘要:
The invention provides an improved method for grit blasting slots in a silicon wafer. The method includes, providing a silicon wafer having a first surface and a second surface, the first surface containing resistive, conductive and insulative layers defining individual semiconductor components, applying a first substantially permanent non-water soluble layer selected from silane, photoresist materials and a combination of a silane layer and a photoresist layer to the first surface of the wafer to provide a first substantially permanent layer thereon, applying a water-soluble protective material to the first layer to provide a second layer, grit blasting slots in the wafer corresponding to the individual semiconductor components, and subsequently, removing the water-soluble protective layer from the wafer. The protective layer provides enhanced protection for the electrical components on a silicon wafer during a grit blasting process so that a higher yield of useable semiconductor chips may be made.
公开/授权文献
- US20030034325A1 Method for making ink jet printheads 公开/授权日:2003-02-20