发明授权
US06853671B2 Method and apparatus for tuning a laser with a Bragg grating in a semiconductor substrate
有权
用于在半导体衬底中用布拉格光栅调谐激光的方法和装置
- 专利标题: Method and apparatus for tuning a laser with a Bragg grating in a semiconductor substrate
- 专利标题(中): 用于在半导体衬底中用布拉格光栅调谐激光的方法和装置
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申请号: US09967445申请日: 2001-09-28
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公开(公告)号: US06853671B2公开(公告)日: 2005-02-08
- 发明人: Ansheng Liu , Mario J. Paniccia , Remus Nicolaescu , Richard Jones
- 申请人: Ansheng Liu , Mario J. Paniccia , Remus Nicolaescu , Richard Jones
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakley, Sokoloff, Taylor & Zafman LLP
- 主分类号: G02B6/12
- IPC分类号: G02B6/12 ; G02B6/124 ; G02F1/01 ; G02F1/025 ; H01S3/08
摘要:
A semiconductor-based laser tuning method and apparatus. In one aspect of the present invention, an apparatus according to an embodiment of the present invention includes a gain medium disposed in a semiconductor substrate. A laser cavity is disposed in the semiconductor substrate and is optically coupled to the gain medium. A first reflector defines one end of the laser cavity. The first reflector includes a first tunable Bragg grating disposed in the semiconductor substrate. The first tunable Bragg grating includes a first plurality of silicon and polysilicon interfaces along the semiconductor substrate such that there is a first plurality of perturbations of a refractive index along the Bragg grating. The first tunable Bragg grating selectively reflects light having a tunable center wavelength so as to emit light through stimulated emission having the tunable center wavelength in the laser cavity. A second reflector defines an other end of the laser cavity.
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