发明授权
- 专利标题: Photoimageable composition
- 专利标题(中): 可光成像
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申请号: US10125134申请日: 2002-04-17
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公开(公告)号: US06858378B1公开(公告)日: 2005-02-22
- 发明人: Paul Dentinger , Karen L. Krafick , Kelby Liv Simison
- 申请人: Paul Dentinger , Karen L. Krafick , Kelby Liv Simison
- 申请人地址: US CA Livermore
- 专利权人: Sandia National Laboratories
- 当前专利权人: Sandia National Laboratories
- 当前专利权人地址: US CA Livermore
- 代理机构: Fliesler Meyer LLP
- 主分类号: C07C381/12
- IPC分类号: C07C381/12 ; G03C1/492 ; G03C1/73 ; G03C1/76 ; G03F7/004 ; G03F7/038 ; G03F7/40
摘要:
The use of photoacid generators including an alkoxyphenylphenyliodonium salt and/or bis(t-butylphenyl)iodonium salt in a photoimageable composition helps improve resolution. Suitable photoimageable compositions includes: (a) a multifuctional polymeric epoxy resin that is dissolved in an organic solvent wherein the epoxy resin comprises oligomers of bisphenol A that is quantitatively protected by glycidyl ether and wherein the oligomers have an average functionality that ranges from about 3 to 12; and a photoacid generator comprising an alkoxyphenylphenyliodonium salt and/or bis(t-butylphenyl)iodonium salt. Preferred alkoxyphenylphenyliodonium salts include 4-octyloxyphenyl phenyliodonium hexafluoroantimonate and 4-methoxyphenyl phenyliodonium hexafluoroantimonate. The photoimageable composition is particularly suited for producing high aspect ratio microstructures.
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