发明授权
- 专利标题: Shaft cooling mechanisms
- 专利标题(中): 轴冷却机构
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申请号: US10157687申请日: 2002-05-29
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公开(公告)号: US06863736B2公开(公告)日: 2005-03-08
- 发明人: William Leavitt , Richard Muka , Steven Richards
- 申请人: William Leavitt , Richard Muka , Steven Richards
- 申请人地址: US MA Danvers
- 专利权人: Ibis Technology Corporation
- 当前专利权人: Ibis Technology Corporation
- 当前专利权人地址: US MA Danvers
- 代理机构: Nutter McClennen & Fish LLP
- 代理商 Thomas J. Engellenner; Reza Mollaaghababa
- 主分类号: C23C14/50
- IPC分类号: C23C14/50 ; H01J37/20 ; H01J37/317 ; H01L21/00 ; C23C16/00
摘要:
The present invention provides a rotating shaft that can extend between two regions having different ambient pressures. The rotating shaft can include a rotatable hollow outer shell that is coupled to a proximal portion of an inner shaft with a limited number of contact points. A plurality of thermal breaks disposed between the inner shaft and the hollow outer shell impede heat transfer between these two components. A rotary seal coupled to the distal portion of the inner shaft preserves the pressure differential between the two regions. Further, a heat sink removes heat transferred to the seal to ensure that the temperature of the seal remains within a range suitable for its operation. The rotating shaft of the invention can be utilized, for example, in an ion implantation system by the coupling of the outer shell to a wafer holder to position and orient a wafer in a path of an ion beam.
公开/授权文献
- US20030221626A1 Shaft cooling mechanisms 公开/授权日:2003-12-04
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