发明授权
- 专利标题: Method of operating an electron beam physical vapor deposition apparatus
- 专利标题(中): 操作电子束物理气相沉积装置的方法
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申请号: US10299646申请日: 2002-11-19
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公开(公告)号: US06863937B2公开(公告)日: 2005-03-08
- 发明人: Robert William Bruce , Antonio Frank Maricocchi , Christopher Lee Lagemann , John Douglas Evans, Sr. , Keith Humphries Betscher , Rudolfo Viguie , David Vincent Rigney , David John Wortman , William Seth Willen
- 申请人: Robert William Bruce , Antonio Frank Maricocchi , Christopher Lee Lagemann , John Douglas Evans, Sr. , Keith Humphries Betscher , Rudolfo Viguie , David Vincent Rigney , David John Wortman , William Seth Willen
- 申请人地址: US NY Schenectady
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Schenectady
- 代理商 David L. Narciso; Gary M. Hartman; Domenica N. S. Hartman
- 主分类号: F02C7/00
- IPC分类号: F02C7/00 ; C23C14/24 ; C23C14/30 ; C23C14/52 ; C23C14/54 ; C23C14/56 ; H01J37/305
摘要:
An electron beam physical vapor deposition (EBPVD) apparatus and a method for using the apparatus to produce a coating material (e.g., a ceramic thermal barrier coating) on an article. The EBPVD apparatus generally includes a coating chamber that is operable at elevated temperatures and subatmospheric pressures. An electron beam gun projects an electron beam into the coating chamber and onto a coating material within the chamber, causing the coating material to melt and evaporate. An article is supported within the coating chamber so that vapors of the coating material deposit on the article. The operation of the EBPVD apparatus is enhanced by the inclusion or adaptation of one or more mechanical and/or process modifications, including those necessary or beneficial when operating the apparatus at coating pressures above 0.010 mbar.
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