Invention Grant
- Patent Title: Method for evaluating image formation performance
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Application No.: US10398524Application Date: 2001-10-09
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Publication No.: US06870668B2Publication Date: 2005-03-22
- Inventor: Toshihiko Ozawa
- Applicant: Toshihiko Ozawa
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2000-309475 20001010; JP2001-32119 20010208
- International Application: PCTJP01/08852 WO 20011009
- International Announcement: WO0231570 WO 20020418
- Main IPC: G02B7/36
- IPC: G02B7/36 ; G02B27/00 ; G03F7/20 ; G02B9/00 ; G02B5/30

Abstract:
The present invention accomplishes an evaluation of image formation performance in which the influence of a coat is accurately reflected. According to the present invention, for the evaluation of image formation performance of an optical system obtained is a pupil transmittance distribution (a distribution of light transmittance on an exit pupil surface) of a light beam that enters an image point to be evaluated of the optical system. At least one of a rotational symmetrical component, an odd symmetrical component, and an even symmetrical component is extracted from the obtained pupil transmittance distribution as an evaluation index.
Public/Granted literature
- US20040070744A1 Method for Evaluating Image Formation Performance Public/Granted day:2004-04-15
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