发明授权
- 专利标题: Aberration-correcting window configurations
- 专利标题(中): 畸变校正窗口配置
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申请号: US10734058申请日: 2003-12-11
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公开(公告)号: US06870695B2公开(公告)日: 2005-03-22
- 发明人: Joseph B. Slater , Kevin L. Davis
- 申请人: Joseph B. Slater , Kevin L. Davis
- 申请人地址: US MI Ann Arbor
- 专利权人: Kaiser Optical Systems
- 当前专利权人: Kaiser Optical Systems
- 当前专利权人地址: US MI Ann Arbor
- 代理机构: Gifford, Krass, Groh, Sprinkle, Anderson & Citkowski, PC
- 主分类号: G02B1/02
- IPC分类号: G02B1/02 ; G02B27/00 ; G02B5/00
摘要:
An optical configuration suited to the monitoring of a process flow through the wall of a containment vessel for producing a high-quality, high-NA sample focus and reduced residual positive spherical aberration. The invention includes an optical path with a window extending through, and sealed to, the wall of the containment vessel, and an optical surface disposed in the optical path associated with minimizing aberration, increasing numerical aperture, or both. The window has a surface facing into the process flow and a surface facing away from the process flow and, the surface facing away from the process flow is associated with minimizing aberration or increasing numerical aperture. A lens is disposed outside the containment vessel and in the optical path, with the surface of the window facing the lens being substantially spherical. With such an arrangement, the light rays of the optical path are generally normal to the surface of the window facing the lens.
公开/授权文献
- US20040136103A1 Aberration-correcting window configurations 公开/授权日:2004-07-15
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