发明授权
- 专利标题: Narrow bitline using Safier for mirrorbit
- 专利标题(中): 使用Safier进行镜像位的窄位线
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申请号: US10755430申请日: 2004-01-12
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公开(公告)号: US06872609B1公开(公告)日: 2005-03-29
- 发明人: Tazrien Kamal , Weidong Qian , Kouros Ghandehari , Taraneh Jamali-Beh
- 申请人: Tazrien Kamal , Weidong Qian , Kouros Ghandehari , Taraneh Jamali-Beh
- 申请人地址: US CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 主分类号: H01L21/337
- IPC分类号: H01L21/337 ; H01L21/8246 ; H01L27/115
摘要:
A technique for forming at least part of an array of a dual bit memory core is disclosed. A Safier material is utilized in the formation process to reduce the size of buried bitlines in the memory, which is suitable for use in storing data for computers and the like. The smaller (e.g., narrower) bitlines facilitate increased packing densities while maintaining an effective channel length between the bitlines. The separation between the bitlines allows dual bits that are stored above the channel within a charge trapping layer to remain sufficiently separated so as to not interfere with one another. In this manner, one bit can be operated on (e.g., for read, write or erase operations) without substantially or adversely affecting the other bit. Additionally, bit separation is preserved and leakage currents, cross talk, as well as other adverse effects that can result from narrow channels are mitigated, and the memory device is allowed to operate as desired.
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