Invention Grant
US06875467B2 Crack resistant sol-gel wafer coatings for integrated optics 失效
用于集成光学的耐裂纹溶胶 - 凝胶晶片涂层

Crack resistant sol-gel wafer coatings for integrated optics
Abstract:
A method of preparing a multi-layer, crack resistant sol-gel glass derived coating on a substrate by removing the outer periphery of each layer before curing the layer and depositing any succeeding layer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0