Invention Grant
- Patent Title: UV-programmable P-type mask ROM
- Patent Title (中): UV可编程P型掩模ROM
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Application No.: US10680023Application Date: 2003-10-06
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Publication No.: US06876044B2Publication Date: 2005-04-05
- Inventor: Tung-Cheng Kuo , Chien-Hung Liu , Shyi-Shuh Pan , Shou-Wei Huang
- Applicant: Tung-Cheng Kuo , Chien-Hung Liu , Shyi-Shuh Pan , Shou-Wei Huang
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: TW91106124A 20020328
- Main IPC: H01L21/8246
- IPC: H01L21/8246 ; H01L27/115 ; H01L29/792 ; H01L31/119

Abstract:
An ultraviolet-programmable P-type Mask ROM is described. The threshold voltages of all memory cells are raised at first to make each memory cell to be in a first logic state, in which the channel is hard to switch on, in order to prevent a leakage current. After the bit lines and the word lines are formed, the Mask ROM is programmed by irradiating the substrate with UV light to inject electrons into the ONO layer under the openings to make the memory cells under the openings be in a second logic state.
Public/Granted literature
- US20040065928A1 UV-programmed P-type mask ROM and fabrication thereof Public/Granted day:2004-04-08
Information query
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