发明授权
- 专利标题: Arrangement for the suppression of particle emission in the generation of radiation based on hot plasma
- 专利标题(中): 基于热等离子体的辐射发生抑制粒子发射的布置
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申请号: US10407394申请日: 2003-04-04
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公开(公告)号: US06881971B2公开(公告)日: 2005-04-19
- 发明人: Imtiaz Ahmad
- 申请人: Imtiaz Ahmad
- 申请人地址: DE Jena
- 专利权人: XTREME technologies GmbH
- 当前专利权人: XTREME technologies GmbH
- 当前专利权人地址: DE Jena
- 代理机构: Reed Smith LLP
- 优先权: DE10215469 20020405
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; H05G2/00 ; H05H1/00 ; H01J17/04 ; H05H1/03 ; H05H1/34
摘要:
The invention is directed to an arrangement for the suppression of particle emission in the generation of radiation based on hot plasma in x-ray radiation sources, particularly EUV radiation sources. The object of the invention, to find a novel possibility for debris filtering in plasma-coupled radiation sources which permits a reliable retention of charged and uncharged particles without substantially reducing transmission or limiting the usable solid angle of radiation, is met, according to the invention, by an arrangement for the suppression of particle emission with generation of radiation based on a hot plasma having a vacuum chamber for generating the plasma in that the outlet opening of the vacuum chamber is followed by means for generating an electric field, wherein the electric field is oriented orthogonal to the central propagation direction of a divergent beam bundle exiting in a defined solid angle, and means for generating a gas sink so that a resulting particle flow is oriented parallel to the direction of the electric field. The particle flow is advantageously further reinforced in the direction of the gas sink by an oppositely arranged gas supply device.
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