公开(公告)号：US07541604B2

公开(公告)日：2009-06-02

申请号：US11560118

申请日：2006-11-15

申请人： Sven Goetze ,  Harald Ebel ,  Juergen Kleinschmidt ,  Imtiaz Ahmad

发明人： Sven Goetze ,  Harald Ebel ,  Juergen Kleinschmidt ,  Imtiaz Ahmad

IPC分类号： H01J17/26 ,  H01J35/00

CPC分类号： H01J17/28 ,  H01J7/26 ,  H05G2/003

摘要： The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying electrode housings. It is the object of the invention to find a novel possibility for gas discharge based short-wavelength radiation sources with high average radiation output in quasi-continuous discharge operation by which efficient cooling principles can be implemented using inexpensive and simple means in order to prevent a temporary melting of the electrode surfaces and, therefore, to ensure a long lifetime of the electrodes. According to the invention, this object is met in that special cooling channels for circulating coolant are integrated in electrode collars of the electrode housings. The cooling channels are advanced radially up to within a few millimeters of the highly thermally stressed surface regions and are connected by necked-down channel portions which are arranged coaxial to the axis of symmetry and which are provided with channel structures for increasing the inner surface and for increasing the flow rate of the coolant.

摘要翻译： 本发明涉及一种用于产生基于由气体放电产生的热等离子体的短波长辐射的装置以及用于制造承载冷却剂的电极壳体的方法。 本发明的目的是在准连续放电操作中找到具有高平均辐射输出的基于气体放电的短波长辐射源的新颖可能性，通过该方法可以使用廉价和简单的方法来实现有效的冷却原理，以便防止 暂时熔化电极表面，因此确保电极寿命长。 根据本发明，由于用于循环冷却剂的特殊冷却通道集成在电极壳体的电极环中，所以满足了该目的。 冷却通道从高度受热应力的表面区域径向推进到几毫米以内，并且通过与对称轴线同轴设置的颈缩通道部分连接，并且设置有用于增加内表面的通道结构， 以增加冷却剂的流量。

公开(公告)号：US20080042356A1

公开(公告)日：2008-02-21

申请号：US11507558

申请日：2006-08-19

申请人： Imtiaz Ahmad ,  Shamim Sherwani Ahmad

发明人： Imtiaz Ahmad ,  Shamim Sherwani Ahmad

IPC分类号： A63F9/20

CPC分类号： A63F1/00 ,  A63F3/0423 ,  A63F2001/0466 ,  A63F2011/0062

摘要： The game consists of a 60 card deck of standard sized playing cards. There are 51 cards with one letter of the English alphabet on the face, six cards with two letters, one with three letters, and two wild cards that can be used as any one letter of the English alphabet. Each card has a numerical value printed on it, which represents the amount of points it is worth during game play. The object of the game is to create word combinations that result in the highest possible numerical score with the cards dealt to the player at the commencement of the game. Game play may end when there are one of the players in a game session has exhausted all of her cards or amassed the highest scoring word combinations. The game is highly customizable, and players may tailor the game's rules to enhance learning and enjoyment.

摘要翻译： 该游戏由一张标准大小的扑克牌的60张卡牌组成。 有51张卡片，一张英文字母表字母，六张卡，两个字母，一个三个字母和两个通配符，可用作英文字母的任何一个字母。 每张卡片上印有数值，表示游戏中值得的点数。 游戏的目标是创建词组合，从而在游戏开始时发送给玩家的卡可以获得最高的数值分数。 当游戏中有一个玩家已经耗尽了所有的卡片或积累了最高得分词组合时，游戏玩法可能会结束。 游戏是高度可定制的，玩家可以根据游戏规则来改善学习和享受。

公开(公告)号：US07911964B1

公开(公告)日：2011-03-22

申请号：US11265480

申请日：2005-11-02

申请人： Imtiaz Ahmad ,  Anthony C. Wells

发明人： Imtiaz Ahmad ,  Anthony C. Wells

IPC分类号： H04J1/16

CPC分类号： H04L65/1083 ,  H04L41/5025 ,  H04L65/1069 ,  H04L65/608 ,  H04L65/80

摘要： A quality management system comprising an interface configured to receive quality information for a session having traffic transported by a communication network between a first end system and a second end system, and transmit a feedback message, and a processing system configured to process the quality information to determine an entity associated with the session, a required service level for the entity, and a delivered service level for the session, process the delivered service level with the required service level to determine a response for the session, and generate the feedback message indicating the response.

摘要翻译： 一种质量管理系统，包括被配置为接收由第一终端系统和第二终端系统之间的由通信网络传送的业务的会话的质量信息的接口，并且发送反馈消息;以及处理系统，被配置为处理所述质量信息 确定与会话相关联的实体，实体的所需服务级别和会话的传送服务级别，处理具有所需服务级别的传送服务级别以确定会话的响应，并且生成指示该会话的反馈消息 响应。

公开(公告)号：US06917954B2

公开(公告)日：2005-07-12

申请号：US10132675

申请日：2002-04-24

申请人： Imtiaz Ahmad ,  David A. Brown

发明人： Imtiaz Ahmad ,  David A. Brown

IPC分类号： G06F7/00 ,  G06F17/00 ,  G06F17/30 ,  H04L12/00 ,  H04L12/56

CPC分类号： H04L45/745 ,  Y10S707/99933 ,  Y10S707/99942 ,  Y10S707/99943 ,  Y10S707/99956

摘要： A load balancing mechanism maps a binary tree representation of a routing table into a set of fixed size memories. The mechanism efficiently utilizes the memory in the routing table without violating the tree precedence constraints and the memory access requirements of a pipelined system. The mechanism stores a subtree associated with a densely populated level of the binary tree in memory associated with lower levels.

摘要翻译： 负载平衡机制将路由表的二叉树表示映射到一组固定大小的存储器中。 该机制有效地利用路由表中的存储器，而不违反流优先级约束和流水线系统的存储器访问要求。 该机制将与二进制树的密集层次相关联的子树存储在与较低级别相关联的存储器中。

公开(公告)号：US06894298B2

公开(公告)日：2005-05-17

申请号：US10267373

申请日：2002-10-09

申请人： Imtiaz Ahmad ,  Guido Schriever ,  Juergen Kleinschmidt

发明人： Imtiaz Ahmad ,  Guido Schriever ,  Juergen Kleinschmidt

IPC分类号： G21K5/00 ,  G03F7/20 ,  G21K5/02 ,  H01L21/027 ,  H05G2/00 ,  H05H1/24 ,  B23K10/00

CPC分类号： H05G2/003 ,  G03F7/70033 ,  H05G2/005

摘要： The invention is directed to a method and an arrangement for generating extreme ultraviolet (EUV) radiation, i.e., radiation of high-energy photons in the wavelength range from 11 to 14 nm, based on a gas discharge. The object of the invention, to find a novel possibility for generating EUV radiation in which an extended life of the system is achieved with stable generation of a dense, hot plasma column, is met according to the invention in that a preionization discharge is ignited between two parallel disk-shaped flat electrodes prior to the main discharge by a surface discharge along the superficies surface of a cylindrical insulator with a plasma column generated through the gas discharge with pulsed direct voltage, which preionization discharge carries out an ionization of the working gas in the discharge chamber by means of fast charged particles. The preionization discharge is triggered within a first electrode housing and the main discharge takes place between a narrowed output of the first electrode housing and a part of the second electrode housing close to the outlet opening of the discharge chamber. The plasma develops in a part of the second electrode housing covered by a tubular insulator and, as a result of the current-induced magnetic field, contracts to form a dense, hot plasma column, one end of which is located in the vicinity of the outlet opening of the second electrode housing.

摘要翻译： 本发明涉及一种基于气体放电产生极紫外（EUV）辐射，即在11至14nm波长范围内的高能量光子辐射的方法和装置。 本发明的目的是为了发现产生EUV辐射的新型可能性，其中通过稳定产生致密的热等离子体柱来实现系统的延长的使用寿命，根据本发明，可以在 两个平行的圆盘形扁平电极在主要放电之前，沿着具有脉冲直流电压通过气体放电产生的等离子体柱的圆柱形绝缘子的表面放电表面放电，该前置放电执行工作气体的离子化 放电室通过快速带电粒子。 预除电放电在第一电极壳体内触发，并且主放电发生在第一电极壳体的变窄的输出端和靠近放电室的出口的第二电极壳体的一部分之间。 等离子体在由管状绝缘体覆盖的第二电极壳体的一部分中产生，并且由于电流感应磁场的结果而收缩以形成致密的热等离子体柱，其一端位于 第二电极壳体的出口开口。

公开(公告)号：US20120248327A1

公开(公告)日：2012-10-04

申请号：US13436923

申请日：2012-03-31

申请人： Denis Bolshukhin ,  Alexander Christian Keller ,  Max Christian Schuermann ,  Guido Schriever ,  Imtiaz Ahmad ,  Juergen Kleinschmidt

发明人： Denis Bolshukhin ,  Alexander Christian Keller ,  Max Christian Schuermann ,  Guido Schriever ,  Imtiaz Ahmad ,  Juergen Kleinschmidt

IPC分类号： H01J3/14

CPC分类号： G03F7/70133 ,  G01J1/4257 ,  G01J1/429 ,  G03F7/70141 ,  G03F7/70166 ,  G03F7/7085 ,  H05G2/001

摘要： The invention is related to the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma, particularly for applications in semiconductor lithography. For acquiring and adjusting characteristics of a beam bundle of high-energy radiation emitted from a plasma and focused by means of collector optics, an intensity distribution of the radiation is acquired over the cross section of a convergent beam bundle in a measuring plane perpendicular to the optical axis in front of an intermediate focus of the collector optics, and intensity values are recorded in defined sectors for a quantity of reception regions of a measuring device which are aligned with different radii concentric to the optical axis, and measured quantities and control variables are determined from a comparison of the intensity values of different sectors for aligning the collector optics.

摘要翻译： 本发明涉及从等离子体发射的高能辐射的束束的特性的调整，特别是在半导体光刻中的应用。 为了获取和调整从等离子体发射并通过集光器光学聚焦的高能辐射束束的特性，在与垂直于等离子体的测量平面中的会聚束束的横截面上获取辐射的强度分布 光轴在收集器光学器件的中间焦点前方，并且强度值被记录在与光轴同心的不同半径对准的测量装置的接收区域的数量的限定扇区中，并且测量的量和控制变量是 由不同扇区的强度值的比较确定，用于对准收集器光学器件。

公开(公告)号：US20070114946A1

公开(公告)日：2007-05-24

申请号：US11560118

申请日：2006-11-15

申请人： SVEN GOETZE ,  Harald Ebel ,  Juergen Kleinschmidt ,  Imtiaz Ahmad

发明人： SVEN GOETZE ,  Harald Ebel ,  Juergen Kleinschmidt ,  Imtiaz Ahmad

IPC分类号： H01J7/24

CPC分类号： H01J17/28 ,  H01J7/26 ,  H05G2/003

摘要： The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying electrode housings. It is the object of the invention to find a novel possibility for gas discharge based short-wavelength radiation sources with high average radiation output in quasi-continuous discharge operation by which efficient cooling principles can be implemented using inexpensive and simple means in order to prevent a temporary melting of the electrode surfaces and, therefore, to ensure a long lifetime of the electrodes. According to the invention, this object is met in that special cooling channels for circulating coolant are integrated in electrode collars of the electrode housings. The cooling channels are advanced radially up to within a few millimeters of the highly thermally stressed surface regions and are connected by necked-down channel portions which are arranged coaxial to the axis of symmetry and which are provided with channel structures for increasing the inner surface and for increasing the flow rate of the coolant.

摘要翻译： 本发明涉及一种用于产生基于由气体放电产生的热等离子体的短波长辐射的装置以及用于制造承载冷却剂的电极壳体的方法。 本发明的目的是在准连续放电操作中找到具有高平均辐射输出的基于气体放电的短波长辐射源的新颖可能性，通过该方法可以使用廉价和简单的方法来实现有效的冷却原理，以便防止 暂时熔化电极表面，因此确保电极寿命长。 根据本发明，由于用于循环冷却剂的特殊冷却通道集成在电极壳体的电极环中，所以满足了该目的。 冷却通道从高度受热应力的表面区域径向推进到几毫米以内，并且通过与对称轴线同轴设置的颈缩通道部分连接，并且设置有用于增加内表面的通道结构， 以增加冷却剂的流量。

公开(公告)号：US06815900B2

公开(公告)日：2004-11-09

申请号：US10741882

申请日：2003-12-19

申请人： Imtiaz Ahmad ,  Juergen Kleinschmidt ,  Guido Schriever ,  Uwe Stamm ,  Sven Goetze

发明人： Imtiaz Ahmad ,  Juergen Kleinschmidt ,  Guido Schriever ,  Uwe Stamm ,  Sven Goetze

IPC分类号： H05H100

CPC分类号： H05G2/003

摘要： The invention is directed to a radiation source for generating extreme ultraviolet (EUV) radiation based on a hot, dense plasma generated by gas discharge. The object of the invention, to find a novel possibility for the realization of an EUV radiation source which achieves a high average radiation output in the EUV region and sufficiently long life and long-term stability, is met according to the invention in that a first electrode housing and a second electrode housing which are electrically separated from one another so as to be resistant to breakdown form parts of a vacuum chamber for a gas discharge for plasma generation, and the second electrode housing has an electrode collar which is enclosed concentrically by the first electrode housing so that the gas discharge is oriented substantially only parallel to the axis of symmetry of the electrode housings, and the electrode collar is stepped radially relative to the concentric insulator layer in such a way that at least one end region of the electrode collar is at a distance from the concentric insulator layer such that a concentric gap is formed. A substantially longer operating duration is achieved by the optimized electrode geometry in conjunction with material selection and effective heat dissipation.

摘要翻译： 本发明涉及一种用于基于由气体放电产生的热的致密等离子体产生极紫外（EUV）辐射的辐射源。 本发明的目的是为了发现实现EUV辐射源的新型可能性，其实现了EUV区域中的高平均辐射输出并且具有足够长的寿命和长期稳定性，根据本发明，满足第一 电极壳体和第二电极壳体，其彼此电分离，以便抵抗用于等离子体产生的气体放电的真空室的部件的分解，并且第二电极壳体具有电极套环，该电极套筒同心地包围 第一电极壳体，使得气体放电基本上仅平行于电极壳体的对称轴线定向，并且电极套环相对于同心绝缘体层级径向地延伸，使得电极套环的至少一个端部区域 距离同心绝缘体层一定距离，从而形成同心间隙。 通过优化的电极几何结构与材料选择和有效散热来实现更长的操作持续时间。

公开(公告)号：US08410422B2

公开(公告)日：2013-04-02

申请号：US13436923

申请日：2012-03-31

申请人： Denis Bolshukhin ,  Alexander Christian Keller ,  Max Christian Schuermann ,  Guido Schriever ,  Imtiaz Ahmad ,  Juergen Kleinschmidt

发明人： Denis Bolshukhin ,  Alexander Christian Keller ,  Max Christian Schuermann ,  Guido Schriever ,  Imtiaz Ahmad ,  Juergen Kleinschmidt

IPC分类号： G12B13/00 ,  G01D18/00

CPC分类号： G03F7/70133 ,  G01J1/4257 ,  G01J1/429 ,  G03F7/70141 ,  G03F7/70166 ,  G03F7/7085 ,  H05G2/001

摘要： The invention is related to the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma, particularly for applications in semiconductor lithography. For acquiring and adjusting characteristics of a beam bundle of high-energy radiation emitted from a plasma and focused by means of collector optics, an intensity distribution of the radiation is acquired over the cross section of a convergent beam bundle in a measuring plane perpendicular to the optical axis in front of an intermediate focus of the collector optics, and intensity values are recorded in defined sectors for a quantity of reception regions of a measuring device which are aligned with different radii concentric to the optical axis, and measured quantities and control variables are determined from a comparison of the intensity values of different sectors for aligning the collector optics.

摘要翻译： 本发明涉及从等离子体发射的高能辐射的束束的特性的调整，特别是在半导体光刻中的应用。 为了获取和调整从等离子体发射并通过集光器光学聚焦的高能辐射束束的特性，在与垂直于等离子体的测量平面中的会聚束束的横截面上获取辐射的强度分布 光轴在收集器光学器件的中间焦点前方，并且强度值被记录在与光轴同心的不同半径对准的测量装置的接收区域的数量的限定扇区中，并且测量的量和控制变量是 由不同扇区的强度值的比较确定，用于对准收集器光学器件。

公开(公告)号：US06881971B2

公开(公告)日：2005-04-19

申请号：US10407394

申请日：2003-04-04

申请人： Imtiaz Ahmad

发明人： Imtiaz Ahmad

IPC分类号： G03F7/20 ,  H05G2/00 ,  H05H1/00 ,  H01J17/04 ,  H05H1/03 ,  H05H1/34

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916

摘要： The invention is directed to an arrangement for the suppression of particle emission in the generation of radiation based on hot plasma in x-ray radiation sources, particularly EUV radiation sources. The object of the invention, to find a novel possibility for debris filtering in plasma-coupled radiation sources which permits a reliable retention of charged and uncharged particles without substantially reducing transmission or limiting the usable solid angle of radiation, is met, according to the invention, by an arrangement for the suppression of particle emission with generation of radiation based on a hot plasma having a vacuum chamber for generating the plasma in that the outlet opening of the vacuum chamber is followed by means for generating an electric field, wherein the electric field is oriented orthogonal to the central propagation direction of a divergent beam bundle exiting in a defined solid angle, and means for generating a gas sink so that a resulting particle flow is oriented parallel to the direction of the electric field. The particle flow is advantageously further reinforced in the direction of the gas sink by an oppositely arranged gas supply device.

摘要翻译： 本发明涉及一种用于抑制在基于X射线辐射源（特别是EUV辐射源）中的热等离子体产生辐射中的颗粒发射的装置。 本发明的目的是为了在等离子体耦合辐射源中发现碎片过滤的新颖可能性，其允许可靠地保持带电和不带电的粒子，而不会基本上减少透射或限制辐射的可用立体角，根据本发明 通过基于具有用于产生等离子体的真空室的热等离子体产生辐射来抑制颗粒发射的布置，因为真空室的出口紧随其后的是产生电场的装置，其中电场 定向成垂直于以限定的立体角度出射的发散束束的中心传播方向，以及用于产生气体吸收器的装置，使得所得到的颗粒流平行于电场的方向定向。 颗粒流有利地通过相对布置的气体供应装置在气槽的方向上进一步增强。