发明授权
- 专利标题: Semiconductor device and manufacturing method therefor
- 专利标题(中): 半导体装置及其制造方法
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申请号: US10370055申请日: 2003-02-21
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公开(公告)号: US06884668B2公开(公告)日: 2005-04-26
- 发明人: Shunpei Yamazaki , Atsuo Isobe , Tamae Takano , Hidekazu Miyairi
- 申请人: Shunpei Yamazaki , Atsuo Isobe , Tamae Takano , Hidekazu Miyairi
- 申请人地址: JP Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Kanagawa-ken
- 代理机构: Robinson Intellectual Property Law Office, P.C.
- 代理商 Eric J. Robinson
- 优先权: JP2002-046911 20020222; JP2002-072661 20020315
- 主分类号: H01L21/20
- IPC分类号: H01L21/20 ; H01L21/77 ; H01L21/84 ; H01L27/12 ; H01L21/00 ; H01L29/04
摘要:
To provide devices relating to a manufacturing method for a semiconductor device using a laser crystallization method, which is capable of reducing a cost involved in a design change, preventing a grain boundary from developing in a channel formation region of a TFT, and preventing a remarkable reduction in mobility of the TFT, a decrease in an ON current, and an increase in an OFF current due to the grain boundary and to a semiconductor device formed by using the manufacturing method. In a semiconductor device according to the present invention, among a plurality of TFTs formed on a base film, some TFTs are electrically connected to form logic elements. The plurality of logic elements are used to form a circuit. The base film has a plurality of projective portions having a rectangular or stripe shape. Island-like semiconductor films included in each of the plurality of TFTs are formed between the plurality of projective portions and also, are crystallized by a laser light scanned in a longitudinal direction of the projective portions.
公开/授权文献
- US20040016967A1 Semiconductor device and manufacturing method therefor 公开/授权日:2004-01-29
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