Invention Grant
- Patent Title: Semiconductor optical devices with differential grating structure and method for manufacturing the same
- Patent Title (中): 具有差分光栅结构的半导体光学器件及其制造方法
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Application No.: US10280691Application Date: 2002-10-25
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Publication No.: US06885804B2Publication Date: 2005-04-26
- Inventor: Kyung-hyun Park , Jung-ho Song , Sung-bock Kim , Kwang-ryong Oh
- Applicant: Kyung-hyun Park , Jung-ho Song , Sung-bock Kim , Kwang-ryong Oh
- Applicant Address: KR
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR
- Agency: Blakely Sokoloff Taylor & Zafman
- Priority: KR2002-7011 20020207
- Main IPC: H01L33/00
- IPC: H01L33/00 ; G02B6/124 ; H01S5/10 ; H01S5/12 ; G02B6/10

Abstract:
A semiconductor optical device with a differential grating formed by a holography method and a method for manufacturing the same are provided. The provided semiconductor optical device includes an n-type InP substrate, a stack structure on the InP substrate having a waveguide and active layers, a first grating formed under the stack structure and on the InP substrate, and a second grating formed on the stack structure. The provided method for manufacturing the semiconductor optical device forms a first grating on the n-type InP substrate and under the active layer, and forms a second grating on the active layer. The first and second gratings are formed by the holography method.
Public/Granted literature
- US20030147617A1 Semiconductor optical devices with differential grating structure and method for manufacturing the same Public/Granted day:2003-08-07
Information query
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