发明授权
- 专利标题: Polishing apparatus
- 专利标题(中): 抛光设备
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申请号: US10108417申请日: 2002-03-29
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公开(公告)号: US06887127B2公开(公告)日: 2005-05-03
- 发明人: Toru Nishikawa , Takeshi Inao
- 申请人: Toru Nishikawa , Takeshi Inao
- 申请人地址: JP Nagaokakyo
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Nagaokakyo
- 代理机构: Burns, Doane, Swecker & Mathis, L.L.P.
- 优先权: JP2001-102894 20010402
- 主分类号: B24B37/08
- IPC分类号: B24B37/08 ; B24B49/10 ; B24B49/00
摘要:
A polishing apparatus is provided for accurately detecting the relative displacement between an upper wheel and a lower wheel and thus for reliably polishing workpieces to a desired thickness. The polishing apparatus includes an upper wheel for pressing at least one workpiece, a lower wheel for supporting the workpiece, non-contact-type displacement-detection device for detecting the relative displacement between the upper wheel and the lower wheel, and a reference table for providing a displacement-detection reference position. The non-contact-type displacement-detection device is joined to the upper wheel so as to move therewith. The reference table is disposed at a position opposing the displacement-detection device and also is integrally connected to the lower wheel.
公开/授权文献
- US20020142703A1 Polishing apparatus 公开/授权日:2002-10-03
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