Invention Grant
- Patent Title: Particle-optical apparatus and method for operating the same
- Patent Title (中): 粒子光学装置及其操作方法
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Application No.: US10639741Application Date: 2003-08-13
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Publication No.: US06891168B2Publication Date: 2005-05-10
- Inventor: Rainer Knippelmeyer
- Applicant: Rainer Knippelmeyer
- Applicant Address: DE
- Assignee: Carl Zeiss NTS GmbH
- Current Assignee: Carl Zeiss NTS GmbH
- Current Assignee Address: DE
- Agent Jones Day
- Priority: DE10237135 20020813
- Main IPC: H01J37/12
- IPC: H01J37/12 ; G21K1/08 ; H01J37/14 ; H01J37/141 ; H01J37/147 ; H01J37/28 ; H01J37/305

Abstract:
An apparatus and a method to manipulate at least one beam of charged particles are provided. The apparatus comprises two rows of field source members 13 which are disposed periodically at a distance from each other such that there exist planes of symmetry S, S′ with respect to which the field source members 13 are symmetrically disposed. The field has a component which is displaceable in the x-direction. To provide such field, a pattern of source strengths according to the formula F1(x)=Fm(x)+Fc(x) is applied to the field source members, wherein Fm is a component which is substantially independent of the displacement x0 and Fc is a correction component which is dependent on x0.
Public/Granted literature
- US20040113092A1 Particle-optical apparatus and method for operating the same Public/Granted day:2004-06-17
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