发明授权
- 专利标题： Light modulator and method of manufacturing the same
- 专利标题（中）： 光调制器及其制造方法
-
申请号： US10171620申请日： 2002-06-17
-
公开(公告)号： US06891654B2公开(公告)日： 2005-05-10
- 发明人: Ryuichi Kurosawa , Shinichi Kamisuki
- 申请人： Ryuichi Kurosawa , Shinichi Kamisuki
- 申请人地址： JP Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Oliff & Berridge, PLC
- 优先权： JP2001-193379 20010626
- 主分类号： B81B5/00
- IPC分类号： B81B5/00 ; B81C3/00 ; G02B26/08 ; G02B26/00
摘要：
A method of manufacturing a light modulator in which micromirrors are tilted by an electrostatic force generated by an electrical potential difference between drive electrodes and the micromirrors. The method includes integrally forming support sections disposed at fulcrum points for tilting the micromirrors and axis portions forming axes for tilting the micromirrors.
公开/授权文献
- US20030161027A1 Light modulator and method of manufacturing the same 公开/授权日：2003-08-28
信息查询
