发明授权
- 专利标题: Separation method for object and glue membrane
- 专利标题(中): 物体和胶膜分离方法
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申请号: US10321491申请日: 2002-12-18
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公开(公告)号: US06896762B2公开(公告)日: 2005-05-24
- 发明人: Story Huang , Jia-Bin Hsu , Chun-Hsien Liu , Chia-Hung Hung
- 申请人: Story Huang , Jia-Bin Hsu , Chun-Hsien Liu , Chia-Hung Hung
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 代理机构: Troxell Law Office, PLLC
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/683 ; B32B35/00
摘要:
The invention provides a separation method for object and glue membrane, and it is characterized: an external force such as tearing apart is pre-applied for appropriately separating the glue membrane and the object, such that the binding ability between the object and the glue membrane is reduced, and a taking-and-placing head then sucks up the object; to achieve said objective, it can arrange a vacuum sucking-up seat that is moveable and has vacuum adsorption hole under the glue membrane, and the sucking force of the vacuum sucking-up seat may generate an external force such as tearing apart to the glue membrane, and the object is then sucked up by the taking-and-placing head; it is also possible to arrange a connection rod to lower down and lift up the taking-and-placing head simultaneously and, before the taking-and-placing head is lowered down to contact the object, it may bring along the connection rod to press down the glue membrane and generate an external force such as tearing apart to the glue membrane, and the object is then sucked up by the taking-and-placing head; since the external force is not applied upon the object, so it may control the deforming rate of the objet to a minimum degree, such that the object may be avoided from being broken and be not caused to move, and it may also peel apart multiple chips, such that the production speed is increased and the taking-up time is shortened.
公开/授权文献
- US20040118515A1 Separation method for object and glue membrane 公开/授权日:2004-06-24
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