发明授权
- 专利标题: Resolving phase-shift conflicts in layouts using weighted links between phase shifters
-
申请号: US10012069申请日: 2001-12-05
-
公开(公告)号: US06901575B2公开(公告)日: 2005-05-31
- 发明人: Shao-Po Wu , Seonghun Cho , Yao-Ting Wang
- 申请人: Shao-Po Wu , Seonghun Cho , Yao-Ting Wang
- 申请人地址: US CA Mountain View
- 专利权人: Numerical Technologies, Inc.
- 当前专利权人: Numerical Technologies, Inc.
- 当前专利权人地址: US CA Mountain View
- 代理机构: Bever, Hoffman & Harms, LLP
- 代理商 Jeanette S. Harms
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; G06F17/50 ; G03F9/00
摘要:
A method of assigning phases to shifters on a layout is provided. The method includes creating a link between any two shifters within a predetermined distance from each other. In one embodiment, the predetermined distance is larger than a minimum feature size on the layout, and smaller than a combined minimum pitch and regulator width. A weight can be assigned to each created link. Phases can be assigned to the shifters, wherein if a phase-shift conflict exists on the layout, then one or more links can be broken based on their weight.