发明授权
- 专利标题: Piezoelectric filter and electronic component including the same
- 专利标题(中): 压电滤波器和包括其的电子元件
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申请号: US10446963申请日: 2003-05-29
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公开(公告)号: US06903496B2公开(公告)日: 2005-06-07
- 发明人: Masaki Takeuchi , Hajime Yamada , Hideki Kawamura , Daisuke Nakamura
- 申请人: Masaki Takeuchi , Hajime Yamada , Hideki Kawamura , Daisuke Nakamura
- 申请人地址: JP Kyoto
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2002-161315 20020603
- 主分类号: H03H9/54
- IPC分类号: H03H9/54 ; H03H9/17 ; H03H9/56 ; H03H9/58 ; H04R17/00
摘要:
A piezoelectric filter includes a piezoelectric thin film disposed on a silicon substrate, and a plurality of piezoelectric resonators each having electrodes facing each other with the piezoelectric thin film sandwiched therebetween, and each of the plurality of piezoelectric resonators has a filtering function. The electrode material of one of the piezoelectric resonators is different from the electrode material of the other piezoelectric resonators. For example, the former electrode material has a higher stiffness than the latter electrode material. The piezoelectric filter achieves high-Q resonance and improves the attenuation characteristic.
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