发明授权
US06905726B2 Component having at least two mutually adjacent insulating layers and corresponding production method
失效
具有至少两个相互相邻的绝缘层的组分和相应的制备方法
- 专利标题: Component having at least two mutually adjacent insulating layers and corresponding production method
- 专利标题(中): 具有至少两个相互相邻的绝缘层的组分和相应的制备方法
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申请号: US09817967申请日: 2001-03-27
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公开(公告)号: US06905726B2公开(公告)日: 2005-06-14
- 发明人: Klaus Lowack , Günter Schmid , Recai Sezi
- 申请人: Klaus Lowack , Günter Schmid , Recai Sezi
- 申请人地址: DE Munich
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munich
- 代理商 Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- 优先权: DE10015215 20000327
- 主分类号: C23C26/00
- IPC分类号: C23C26/00 ; C23C28/00 ; H01L21/768 ; H01L23/498 ; H01L23/532 ; B05D3/04
摘要:
The invention relates to a component having two adjacent insulating layers and to a production process therefore. The component has an activated insulating layer, which can be converted into an electrically conductive layer by metallization.
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