Invention Grant
- Patent Title: Method and system for supplying high purity fluid
- Patent Title (中): 供应高纯度流体的方法和系统
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Application No.: US10331123Application Date: 2002-12-26
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Publication No.: US06911065B2Publication Date: 2005-06-28
- Inventor: Tadaharu Watanabe , Robert Torres, Jr. , Joseph Vininski
- Applicant: Tadaharu Watanabe , Robert Torres, Jr. , Joseph Vininski
- Applicant Address: US CO Longmont
- Assignee: Matheson Tri-Gas, Inc.
- Current Assignee: Matheson Tri-Gas, Inc.
- Current Assignee Address: US CO Longmont
- Agency: Hogan & Hartson L.L.P.
- Agent Kent A. Lembke
- Main IPC: B01D53/02
- IPC: B01D53/02 ; B01J4/04 ; C23C16/44 ; F17C5/00 ; F17C6/00 ; F17C7/00 ; F17C9/00 ; F17C13/02 ; B01D53/04

Abstract:
A fluid purifying apparatus that includes a manifold that includes a first branch and a second branch, a first check valve coupled to the first branch of the manifold, and a purifier unit that includes a first end and a second end, wherein the first end is coupled to the second branch of the manifold. Also, a fluid purifying apparatus that includes a vessel that includes a first interior compartment for containing a purifier material and a second interior compartment for containment of a fluid containing impurities, wherein the first interior compartment is separated from the second interior compartment by a fluid permeable support, and a rupturable seal.
Public/Granted literature
- US20040123735A1 Method and system for supplying high purity fluid Public/Granted day:2004-07-01
Information query
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