发明授权
US06912893B2 Apparatus and method for improving tuning of a probe-based instrument
失效
用于改善基于探针的仪器调谐的装置和方法
- 专利标题: Apparatus and method for improving tuning of a probe-based instrument
- 专利标题(中): 用于改善基于探针的仪器调谐的装置和方法
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申请号: US10417506申请日: 2003-04-17
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公开(公告)号: US06912893B2公开(公告)日: 2005-07-05
- 发明人: Stephen C. Minne , Hector B. Cavazos
- 申请人: Stephen C. Minne , Hector B. Cavazos
- 申请人地址: US NY Woodbury
- 专利权人: Veeco Instruments Inc.
- 当前专利权人: Veeco Instruments Inc.
- 当前专利权人地址: US NY Woodbury
- 代理机构: Boyle Fredrickson Newholm Stein & Gratz S.C.
- 主分类号: G01Q70/02
- IPC分类号: G01Q70/02 ; G01Q70/04 ; G01N13/16 ; G01B5/28
摘要:
A method of operating a probe-based instrument includes providing a probe assembly and a probe holder and oscillating a probe of the probe assembly with an actuator that generates oscillation energy. The method also includes mounting the probe assembly on the probe holder so as to lessen interference with the oscillation energy coupled to the tip of the probe. A corresponding probe assembly includes a base having two substantially opposed surfaces and a cantilever extending from the base and supporting a tip. The probe assembly is mounted in a probe holder such that a probe holder surface contacts one of the opposed surfaces. The one opposed surface preferably includes at least one opening such that the surface area of the one opposed surface is substantially less than the surface area of the probe holder surface.
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