发明授权
- 专利标题: Vacuum oven, system incorporating the same and method of using the same
- 专利标题(中): 真空烘箱,系统结构和使用方法
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申请号: US10268469申请日: 2002-10-10
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公开(公告)号: US06914218B2公开(公告)日: 2005-07-05
- 发明人: Dmitry Vernik , Christopher B. Dreike , Terry D. Wolfson
- 申请人: Dmitry Vernik , Christopher B. Dreike , Terry D. Wolfson
- 申请人地址: US CA Hawthorne
- 专利权人: Wems, Inc.
- 当前专利权人: Wems, Inc.
- 当前专利权人地址: US CA Hawthorne
- 代理机构: Christie, Parker & Hale, LLP
- 主分类号: A61N1/362
- IPC分类号: A61N1/362 ; F26B5/04 ; F26B25/06 ; F27B5/02 ; F27B5/04 ; F27B5/14 ; F27B17/00 ; F27D11/00 ; F27D19/00 ; F27D21/00 ; H01L21/302
摘要:
A vacuum oven for decontaminating items, a system incorporating multiple such vacuum ovens and a method of operating such system are provided. The ovens are portable. They can have a vacuum drawn in them and can be heated by being coupled to a vacuum and a power source, respectively at a first location and then be decoupled from the vacuum and power sources and moved to a second location such as a glove box or clean room while still maintaining a vacuum.
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