发明授权
- 专利标题: Double-ended tuning fork vibratory gyro-sensor
- 专利标题(中): 双端音叉振动陀螺传感器
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申请号: US10664821申请日: 2003-09-17
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公开(公告)号: US06915694B2公开(公告)日: 2005-07-12
- 发明人: Yoshiro Tomikawa , Kenji Sato , Atsushi Ono
- 申请人: Yoshiro Tomikawa , Kenji Sato , Atsushi Ono
- 申请人地址: JP Kanagawa
- 专利权人: Toyo Communication Equipment Co., Ltd.
- 当前专利权人: Toyo Communication Equipment Co., Ltd.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Darby & Darby
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01C19/574 ; H01L41/08 ; H01L41/18 ; G01P9/04
摘要:
The object of the present invention is to provide an angular velocity sensor that uses Coriolis force with a flatly supported double tuning fork structure that uses an in-plane asymmetrical flexural secondary mode. A large support area is used to provide a high-precision angular velocity sensor with superior resistance to vibration and impact. A double tuning fork gyro-sensor is formed integrally from: two arms; a driver electrode formed on the arms; and a double tuning fork supporting the ends of the arms. Also included are: a detection module connected to the double tuning fork support section; a detection electrode formed on the detection module; and a support securing section for the detection module. When there is rotation, the Coriolis force acting on the arms is transferred to the detection module by way of the double tuning fork support section so that an in-plane asymmetrical flexural secondary vibration takes place.
公开/授权文献
- US20050056095A1 Double-ended tuning fork vibratory gyro-sensor 公开/授权日:2005-03-17
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