Invention Grant
US06917105B2 Integrating chip scale packaging metallization into integrated circuit die structures 有权
将芯片级封装金属化集成到集成电路管芯结构中

  • Patent Title: Integrating chip scale packaging metallization into integrated circuit die structures
  • Patent Title (中): 将芯片级封装金属化集成到集成电路管芯结构中
  • Application No.: US10453157
    Application Date: 2003-06-03
  • Publication No.: US06917105B2
    Publication Date: 2005-07-12
  • Inventor: Martin Alter
  • Applicant: Martin Alter
  • Applicant Address: US CA San Jose
  • Assignee: Micrel, Incorporated
  • Current Assignee: Micrel, Incorporated
  • Current Assignee Address: US CA San Jose
  • Agent J. Vincent Tortolano; Eugene H. Valet
  • Main IPC: H01L21/60
  • IPC: H01L21/60 H01L23/31 H01L23/485 H01L23/48
Integrating chip scale packaging metallization into integrated circuit die structures
Abstract:
Wafer-level chip-scale packaging technology is used for improving performance or reducing size of integrated circuits by using metallization of pad-to-bump-out beams as part of the integrated circuit structure. Chip-scale packaging under bump metal is routed to increase the thickness of top metal of the integrated circuit, increasing current carrying capability and reducing resistance. An exemplary embodiment for a power MOSFET array integrated structure is described.
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