发明授权
- 专利标题: Semiconductor fuses and semiconductor devices containing the same
- 专利标题(中): 半导体保险丝和含有其的半导体器件
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申请号: US10620054申请日: 2003-07-14
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公开(公告)号: US06927473B2公开(公告)日: 2005-08-09
- 发明人: Zhongze Wang , Michael P. Violette , Jigish Trivedi
- 申请人: Zhongze Wang , Michael P. Violette , Jigish Trivedi
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: TraskBritt
- 主分类号: H01L23/525
- IPC分类号: H01L23/525 ; H01L29/00
摘要:
Fuses for integrated circuits and semiconductor devices, methods for making and using the same, and semiconductor devices containing the same. The semiconductor fuse contains two conductive layers, an overlying and underlying layer, on an insulating substrate. The underlying layer comprises titanium nitride and the overlying layer comprises tungsten silicide. The semiconductor fuse may be fabricated during manufacture of a local interconnect structure containing the same materials. The fuse, which may be used to program redundant circuitry, is blown by electrical current rather than laser beams, thus allowing the fuse width to be smaller than prior art fuses blown by laser beams. The fuse may also be blown by less electrical current than the current required to blow conventional polysilicon fuses having similar dimensions.
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