发明授权
US06928723B2 Method for making a magnetoresistive sensor having a cobalt-ferrite pinning layer
失效
制造具有钴铁氧体钉扎层的磁阻传感器的方法
- 专利标题: Method for making a magnetoresistive sensor having a cobalt-ferrite pinning layer
- 专利标题(中): 制造具有钴铁氧体钉扎层的磁阻传感器的方法
-
申请号: US10746021申请日: 2003-12-23
-
公开(公告)号: US06928723B2公开(公告)日: 2005-08-16
- 发明人: Matthew Joseph Carey , Hoa Van Do , Robin Frederick Charles Farrow , Bruce Alvin Gurney , David Thomas Margulies , Ronald Franklin Marks , Philip Milton Rice , Ren Xu
- 申请人: Matthew Joseph Carey , Hoa Van Do , Robin Frederick Charles Farrow , Bruce Alvin Gurney , David Thomas Margulies , Ronald Franklin Marks , Philip Milton Rice , Ren Xu
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Lumen Intellectual Property Services, Inc.
- 主分类号: G01R33/09
- IPC分类号: G01R33/09 ; G11B5/012 ; G11B5/39 ; H01F10/32 ; H01F41/30 ; G11B5/127 ; H04R31/00
摘要:
An exchange-coupled magnetic structure of a cobalt-ferrite layer adjacent a magnetic metal layer is used in magnetorestive sensors, such as spin valves or tunnel junction valves. The exchange-coupled magnetic structure is used in a pinning structure pinning the magnetization of a ferromagnetic pinned layer, or in an AP pinned layer. A low coercivity ferrite may be used in an AP free layer. Cobalt-ferrite layers may be formed by co-sputtering of Co and Fe in an oxygen/argon gas mixture, or by sputtering of a CoFe2 composition target in an oxygen/argon gas mixture. Alternatively, the cobalt-ferrite layer may be formed by evaporation of Co and Fe from an alloy source or separate sources along with a flux of oxygen atoms from a RF oxygen atom beam source. Magnetoresistive sensors including cobalt-ferrite layers have small read gaps and produce large signals with high efficiency.
公开/授权文献
- US20040134060A1 Spin valves with co-ferrite pinning layer 公开/授权日:2004-07-15