Invention Grant
US06929874B2 Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck
有权
氮化铝烧结体，陶瓷基板，陶瓷加热器和静电吸盘
- Patent Title: Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck
- Patent Title (中): 氮化铝烧结体，陶瓷基板，陶瓷加热器和静电吸盘
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Application No.: US10442967Application Date: 2003-05-22
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Publication No.: US06929874B2Publication Date: 2005-08-16
- Inventor: Yasuji Hiramatsu , Yasutaka Ito
- Applicant: Yasuji Hiramatsu , Yasutaka Ito
- Applicant Address: JP Ogaki
- Assignee: Ibiden Co., Ltd.
- Current Assignee: Ibiden Co., Ltd.
- Current Assignee Address: JP Ogaki
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2000-048262 20000224; JP2000-048338 20000224; JP2000-202826 20000704; JP2000-361768 20001128; JP2000-367541 20001201
- Main IPC: C04B35/08
- IPC: C04B35/08 ; C04B35/10 ; C04B35/14 ; C04B35/565 ; C04B35/575 ; C04B35/581 ; C04B35/583 ; C04B35/584 ; H01L21/00 ; H01L21/68 ; H01L21/683 ; H05B3/14 ; H05B3/74 ; B32B9/04
Abstract:
The object of the present invention is to provide an aluminum nitride sintered body which has excellent mechanical strength and in which ceramic particles is prevented from coming off from the surface and/or side thereof and generation of free particles is suppressed. The aluminum nitride sintered body of the present invention is wherein it contains sulfur.
Public/Granted literature
- US20030203225A1 Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck Public/Granted day:2003-10-30
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