Invention Grant
- Patent Title: Method of determining the endpoint of a planarization process
- Patent Title (中): 确定平坦化过程终点的方法
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Application No.: US10248950Application Date: 2003-03-05
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Publication No.: US06932674B2Publication Date: 2005-08-23
- Inventor: Peter Lahnor , Olaf Kuehn , Andreas Roemer , Alexander Simpson
- Applicant: Peter Lahnor , Olaf Kuehn , Andreas Roemer , Alexander Simpson
- Applicant Address: DE Munich
- Assignee: Infineon Technologies Aktientgesellschaft
- Current Assignee: Infineon Technologies Aktientgesellschaft
- Current Assignee Address: DE Munich
- Agency: Slater & Matsil, L.L.P.
- Main IPC: B24B49/00
- IPC: B24B49/00
Abstract:
A method of determining the endpoint of a planarizing process is disclosed. An endpoint detection signal is selectively sampled from at least one predetermined location within a planarizing region defined on a planarizing web. Planarization is stopped when the endpoint criterion based on the endpoint detection signal is detected.
Public/Granted literature
- US20040176015A1 METHOD OF DETERMINING THE ENDPOINT OF A PLANARIZATION PROCESS Public/Granted day:2004-09-09
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