发明授权
- 专利标题： Managing work-piece deflection
- 专利标题（中）： 管理工件偏转
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申请号： US10209284申请日： 2002-07-30
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公开(公告)号： US06932873B2公开(公告)日： 2005-08-23
- 发明人: Betsalel Tzvi Rechav , Jimmy Vishnipolsky , Efim Vinnitsky
- 申请人： Betsalel Tzvi Rechav , Jimmy Vishnipolsky , Efim Vinnitsky
- 申请人地址： IL Rehovot
- 专利权人： Applied Materials Israel, Ltd.
- 当前专利权人： Applied Materials Israel, Ltd.
- 当前专利权人地址： IL Rehovot
- 代理机构： Blakely, Sokoloff, Taylor & Zafman
- 主分类号： B01J3/03
- IPC分类号： B01J3/03 ; H01L21/00 ; H01L21/20 ; C23C16/00
摘要：
A work-piece deflection management system including: (a) a first and a second vacuum chambers, each said vacuum chamber having an air-bearing seal circumscribing one of its sides, and (b) a work-piece plate; wherein the air-bearing seals are aligned to face one-another with the work-piece plate respectively there-between, allowing the work-piece to be laterally slid with respect to the air-bearing seals while maintaining a first predefined vacuum level within the first vacuum chamber and maintaining a second predefined vacuum level within the second vacuum chamber.
公开/授权文献
- US20040020438A1 Managing work-piece deflection 公开/授权日：2004-02-05
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