Invention Grant
- Patent Title: Managing work-piece deflection
- Patent Title (中): 管理工件偏转
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Application No.: US10209284Application Date: 2002-07-30
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Publication No.: US06932873B2Publication Date: 2005-08-23
- Inventor: Betsalel Tzvi Rechav , Jimmy Vishnipolsky , Efim Vinnitsky
- Applicant: Betsalel Tzvi Rechav , Jimmy Vishnipolsky , Efim Vinnitsky
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel, Ltd.
- Current Assignee: Applied Materials Israel, Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Blakely, Sokoloff, Taylor & Zafman
- Main IPC: B01J3/03
- IPC: B01J3/03 ; H01L21/00 ; H01L21/20 ; C23C16/00

Abstract:
A work-piece deflection management system including: (a) a first and a second vacuum chambers, each said vacuum chamber having an air-bearing seal circumscribing one of its sides, and (b) a work-piece plate; wherein the air-bearing seals are aligned to face one-another with the work-piece plate respectively there-between, allowing the work-piece to be laterally slid with respect to the air-bearing seals while maintaining a first predefined vacuum level within the first vacuum chamber and maintaining a second predefined vacuum level within the second vacuum chamber.
Public/Granted literature
- US20040020438A1 Managing work-piece deflection Public/Granted day:2004-02-05
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