Invention Grant
- Patent Title: Apparatus and method of measuring optical properties of diffractive optical element
- Patent Title (中): 测量衍射光学元件的光学性质的装置和方法
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Application No.: US10340620Application Date: 2003-01-13
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Publication No.: US06937327B2Publication Date: 2005-08-30
- Inventor: Keiji Fuse
- Applicant: Keiji Fuse
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2002/007599 20020116
- Main IPC: G01M11/00
- IPC: G01M11/00 ; B23K26/067 ; B23K26/38 ; B23K26/42 ; G01M11/02 ; G02B5/18 ; G01B9/00

Abstract:
A laser beam emitted from a laser source is split by a beam-splitting means such as a beam sampler, and the power Q of the split beam is measured by a first detector. In addition, the power q1 of light that has passed through a pinhole while a DOE is not set is measured by a second detector, and the power ratio α=q1/Q is calculated. Then, the DOE is set and the power ratio βk=qk/Q, where qk is the power of each light beam, is calculated. The power ratio βk is evaluated on the basis of the power ratio α, so the optical properties of a diffractive optical element, in particular, in terms of diffraction efficiency in laser-beam diffraction and intensity uniformity of split beams can be measured with high accuracy.
Public/Granted literature
- US20030137656A1 Apparatus and method of measuring optical properties of diffractive optical element Public/Granted day:2003-07-24
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