发明授权
- 专利标题: IC chip manufacturing method
- 专利标题(中): IC芯片制造方法
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申请号: US10475257申请日: 2003-01-15
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公开(公告)号: US06939741B2公开(公告)日: 2005-09-06
- 发明人: Masateru Fukuoka , Yasuhiko Oyama , Munehiro Hatai , Satoshi Hayashi , Shigeru Danjo , Masahiko Kitamura , Koichi Yajima
- 申请人: Masateru Fukuoka , Yasuhiko Oyama , Munehiro Hatai , Satoshi Hayashi , Shigeru Danjo , Masahiko Kitamura , Koichi Yajima
- 申请人地址: JP Osaka JP Tokyo
- 专利权人: Sekisui Chemical Co., Ltd.,Disco Corporation
- 当前专利权人: Sekisui Chemical Co., Ltd.,Disco Corporation
- 当前专利权人地址: JP Osaka JP Tokyo
- 代理机构: Connolly, Bove, Lodge & Hutz, LLP
- 优先权: JP2002-006556 20020115; JP2002-006557 20020115; JP2002-006558 20020115
- 国际申请: PCT/JP03/00238 WO 20030115
- 国际公布: WO03/06097 WO 20030724
- 主分类号: B24B37/04
- IPC分类号: B24B37/04 ; C09J5/08 ; C09J7/02 ; H01L21/301 ; H01L21/304 ; H01L21/44 ; H01L21/46 ; H01L21/48 ; H01L21/68 ; H01L21/78
摘要:
It is an object of the invention to provide a method for manufacturing an IC chip wherein a wafer is prevented from being damaged and the ease of handling thereof is improved so that the wafer can be appropriately processed into IC chips, even if a thickness of the wafer is extremely reduced to approximately 50 μm.The invention provides a method for manufacturing an IC chip comprising, at least: the step of securing a wafer to a support plate via a support tape having a surface layer comprising an adhesive (A) containing a gas generating agent for generating a gas due to stimulation and a surface layer comprising an adhesive (B); the step of polishing said wafer with securing said wafer to said support plate via said support tape; the step of adhering a dicing tape to said polished wafer; the step of providing said stimulation to said adhesive (A) layer; the step of removing said support tape from said wafer; and the step of dicing said wafer, which comprises adhering said surface layer comprising adhesive (A) to said wafer and adhering said surface layer comprising adhesive (B) to said support plate in the step of securing said wafer to said support plate via said support tape, providing said stimulation while uniformly sucking under reduced pressure the entirety of said wafer from the dicing tape side thereof, and then removing said support tape from said wafer in the step of providing stimulation to said adhesive (A) layer and in the step of removing said support tape from said wafer.
公开/授权文献
- US20040185639A1 Ic chip manufacturing method 公开/授权日:2004-09-23
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