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US06944368B2 Waveguide-to-semiconductor device coupler 有权
波导到半导体器件耦合器

Waveguide-to-semiconductor device coupler
摘要:
A waveguide-semiconductor coupling device includes a waveguide structure that includes a multimode interferometer (MMI) structure so as to minimize the reflections of TE modes in the coupling device. A mesa structure is coupled to the waveguide structure so as to minimize the reflections of TM modes in the coupling device.
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