发明授权
- 专利标题: Vertical MEMS gyroscope by horizontal driving
- 专利标题(中): 垂直MEMS陀螺仪通过水平驱动
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申请号: US10744099申请日: 2003-12-24
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公开(公告)号: US06952965B2公开(公告)日: 2005-10-11
- 发明人: Seok-jin Kang , Seok-whan Chung , Moon-chul Lee , Kyu-dong Jung , Seog-soo Hong
- 申请人: Seok-jin Kang , Seok-whan Chung , Moon-chul Lee , Kyu-dong Jung , Seog-soo Hong
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2002-82983 20021224
- 主分类号: B81B7/00
- IPC分类号: B81B7/00 ; B81B3/00 ; B81B5/00 ; B81C1/00 ; G01C19/56 ; G01C19/5762 ; G01C19/5769 ; G01P9/04
摘要:
A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate, a detecting structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to the substrate, a cap wafer bonded with the substrate positioned above the driving structure and the detecting structure, and a fixed vertical displacement detection electrode formed at a predetermined location of an underside of the cap wafer, for detecting displacement of the detecting structure in the vertical direction.