发明授权
- 专利标题: Method for manufacturing a dynamic quantity detection device
- 专利标题(中): 动态量检测装置的制造方法
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申请号: US10404073申请日: 2003-04-02
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公开(公告)号: US06960487B2公开(公告)日: 2005-11-01
- 发明人: Yasutoshi Suzuki , Shinji Yoshihara , Takahiko Yoshida
- 申请人: Yasutoshi Suzuki , Shinji Yoshihara , Takahiko Yoshida
- 申请人地址: JP Nishio JP Kariya
- 专利权人: Nippon Soken, Inc.,Denso Corporation
- 当前专利权人: Nippon Soken, Inc.,Denso Corporation
- 当前专利权人地址: JP Nishio JP Kariya
- 代理机构: Posz Law Group, PLC
- 优先权: JP2002-107856 20020410
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; H01L21/58 ; H01L29/84
摘要:
A method for manufacturing a dynamic quantity detection device includes bonding a semiconductor chip that includes a detection element for detecting a dynamic quantity to a stand using a bonding layer. Initially, a semiconductor chip is formed that includes a detection element used for correlating a dynamic quantity to be detected to an electric quantity and a processing circuit element used for a circuit that processes the electric quantity. Further, a bonding layer is placed on a stand. The semiconductor chip is then placed on the bonding layer and the semiconductor chip is bonded to the stand by sintering the bonding layer at 400° C. or lower in order to suppress a change in a characteristic of the processing circuit element.
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