发明授权
- 专利标题: Method and apparatus for thermal profiling of flip-chip packages
- 专利标题(中): 倒装芯片封装的热分析方法和装置
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申请号: US09465131申请日: 1999-12-16
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公开(公告)号: US06962437B1公开(公告)日: 2005-11-08
- 发明人: Sarathy Rajagopalan , Minh Vuong
- 申请人: Sarathy Rajagopalan , Minh Vuong
- 申请人地址: US CA Milpitas
- 专利权人: LSI Logic Corporation
- 当前专利权人: LSI Logic Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Fitch, Even, Tabin & Flannery
- 主分类号: G01K7/00
- IPC分类号: G01K7/00 ; G01K7/02
摘要:
A thermal measurement device for obtaining accurate thermal profiles during flip-chip semiconductor packaging and methodologies for making such devices is disclosed. Particularly, a measurement device comprised of a thermocouple sandwiched between a semiconductor packaging substrate and a semiconductor die. Such a device providing increased accuracy in temperature measurement. The present invention also teaches a packaging substrate assembled with a semiconductor die having an opening in the substrate enabling the placement of a thermocouple such that it is in contact with the die and secured in place. Additionally, methods of constructing the devices of the present invention are disclosed.
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