发明授权
- 专利标题： Method for room temperature metal direct bonding
- 专利标题（中）： 室温金属直接接合方法
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申请号： US10359608申请日： 2003-02-07
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公开(公告)号： US06962835B2公开(公告)日： 2005-11-08
- 发明人: Qin-Yi Tong , Paul M. Enquist , Anthony Scot Rose
- 申请人： Qin-Yi Tong , Paul M. Enquist , Anthony Scot Rose
- 申请人地址： US NC Morrisville
- 专利权人： Ziptronix, Inc.
- 当前专利权人： Ziptronix, Inc.
- 当前专利权人地址： US NC Morrisville
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 主分类号： H01L21/60
- IPC分类号： H01L21/60 ; H01L21/98 ; H01L21/44 ; H01L21/48 ; H01L21/50
摘要：
A bonded device structure including a first substrate having a first set of metallic bonding pads, preferably connected to a device or circuit, and having a first non-metallic region adjacent to the metallic bonding pads on the first substrate, a second substrate having a second set of metallic bonding pads aligned with the first set of metallic bonding pads, preferably connected to a device or circuit, and having a second non-metallic region adjacent to the metallic bonding pads on the second substrate, and a contact-bonded interface between the first and second set of metallic bonding pads formed by contact bonding of the first non-metallic region to the second non-metallic region. At least one of the first and second substrates may be elastically deformed.
公开/授权文献
- US20040157407A1 Room temperature metal direct bonding 公开/授权日：2004-08-12
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